The PhableX tool is the semi-automated scaling solution for photonics customers. The cassette-in cassette-out design increases consistency and throughput. Automated mask and wafer alignment and handling make the PhableX an operator-friendly solution.
Structures such as sub-micron period linear gratings and 2D patterns such as hexagonal and square lattices are printed with high uniformity and fidelity.
The applications are almost unlimited including: