PhableX
PHABLE tools, based on Eulitha's proprietary Displacement Talbot Lithography (DTL) technology, offer unparalleled high-resolution printing with a low-cost photolithography system. They overcome the limitations of diffraction in conventional lithography, enabling the printing of sub-micron periodic patterns with excellent quality. The non-contact exposures protect both the mask and wafer, while the patented focus-free imaging allows uniform printing on non-flat substrates and in thick resists.
