PRODUCTS &
SERVICES
ABOUT
Standard Phable™ -made Nanoimprint Templates
Eulitha’s photonic templates are made with its revolutionary PHABLE™ technology, which guarantees highest quality at an affordable price. Optimized silicon and quartz etching yields hole and pillar patterns with a slight positive slope that facilitates the imprint process. Standard templates with square and hexagonal lattices as well as linear gratings are available.
ABOUT
Application
The applications are almost unlimited including:
- Nanoimprint process and product development
- Laser diffraction gratings
- Plasmonics
- Antireflection structures
- Wiregrid polarizers
- Sensor arrays
- Templates for crystal growth
- Research and development
PHABLE™ made Standard Patterns:
- Photonic templates are provided on 4” Silicon or Fused Silica substrates as standard
- In most cases these standard patterns can be produced on customer’s own wafers, e.g. as photoresist patterns on GaN or sapphire wafers
- In certain cases templates on other substrates, e.g. 75mm, 150mm and 200mm wafers are available upon request
- Dicing to smaller substrate sizes are available upon request
- Feature (hole or pillar) diameter is about half of the pattern pitch
- Please inquire, if other duty-cycles, e.g. small pillars or holes, are required
- Templates are manufactured upon order according to the feature height requested by the customer
- Inquire for different feature heights that exceed the maximum indicated in the product tables
- Anti-adhesion coating as well as dicing is available as an option on all NIL stamps
Multi-Resolution Linear Grating Combinations – Download data sheet
| Product | Pattern Period | Pattern Area | Linewidth | Max. Feature Height (Si/Quartz) |
|---|---|---|---|---|
| MP250L300 | 250nm, 275nm, 300nm |
7x7mm2 square each | 90nm/250nm, 100nm/275nm, 120nm/300nm |
<200nm / <100nm |
| MP300L600 | 300nm, 400nm, 500nm, 600nm |
10x10mm2 square each | 135nm/300nm, 175nm/400nm, 250nm/500nm, 300nm/600nm |
<300nm / <150nm |
| MP800L1500 | 800nm, 1000nm, 1200nm, 1500nm |
20x20mm2 square each | 400nm/800nm, 500nm/1000nm, 600nm/1200nm, 700nm/1500nm |
<1000nm / <500nm |
| MP500L2050 | 500nm, 550nm,…, 2000nm, 2050nm |
12x12mm2 square each | <600nm / <300nm |
SEM image of a 1.3um period v-groove pattern in silicon
Hexagonal array – 600nm pitch
High resolution linear grating – 140nm period
SEM image of a 600nm-period exagonal array of Au discs