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Impressive high aspect ratio Si micropillars using Eulitha Technology.
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15.01.2023
Impressive high aspect ratio Si micropillars using Eulitha Technology.

Impressive high aspect ratio Si micropillars made by our colleagues at the Paul Scherrer Institut PSI using EULITHA AG’s PhableR™ UV Lithography system and MacEtch process.

Here is the full report: https://lnkd.in/er9VS3gd

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