SERVICES
Standard Patterns
Eulitha employs its proprietary DTL technology to offer the most comprehensive range of periodic nano-patterns as standard products. These solutions enable research and development teams in industrial and academic settings to access wide-area patterns cost-effectively.
Our photonic templates are engineered using advanced DTL technology to deliver unparalleled quality at an affordable price. Optimized for silicon and quartz, our templates feature hole and pillar patterns designed with a slight positive slope to simplify the imprinting process. We also offer a variety of standard templates, including square, hexagonal, and linear grating patterns.
ABOUT
Application
Our applications span a diverse range of fields, including
- Nanoimprint templates
- Laser diffraction gratings
- Plasmonics
- Antireflection structures
- Wire grid polarizers
- Sensor arrays
- Templates for crystal growth
- Research and development
Standard Patterns:
- Photonic templates are provided on 4” Silicon or Fused Silica substrates as standard
- In most cases these standard patterns can be produced on customer’s own wafers, e.g. as photoresist patterns on GaN or sapphire wafers
- In certain cases templates on other substrates, e.g. 75mm, 150mm and 200mm wafers are available upon request
- Dicing to smaller substrate sizes are available upon request
- Feature (hole or pillar) diameter is about half of the pattern pitch
- Please inquire, if other duty-cycles, e.g. small pillars or holes, are required
- Templates are manufactured upon order according to the feature height requested by the customer
- Inquire for different feature heights that exceed the maximum indicated in the product tables
- Anti-adhesion coating as well as dicing is available as an option on all NIL stamps
Multi-Resolution Linear Grating Combinations – Download data sheet
| Product | Pattern Period | Pattern Area | Linewidth | Max. Feature Height (Si/Quartz) |
|---|---|---|---|---|
| MP250L300 | 250nm, 275nm, 300nm | 7x7mm2 square each | 90nm/250nm, 100nm/275nm, 120nm/300nm | <200nm / <100nm |
| MP300L600 | 300nm, 400nm, 500nm, 600nm | 10x10mm2 square each | 135nm/300nm, 175nm/400nm, 250nm/500nm, 300nm/600nm | <300nm / <150nm |
| MP800L1500 | 800nm, 1000nm, 1200nm, 1500nm | 20x20mm2 square each | 400nm/800nm, 500nm/1000nm, 600nm/1200nm, 700nm/1500nm | <1000nm / <500nm |
| MP500L2050 | 500nm, 550nm,…, 2000nm, 2050nm | 12x12mm2 square each | <600nm / <300nm |
Linear Gratings
| Product | Period | Area | Max. Etch Depth (Si/quartz) |
|---|---|---|---|
| P125L_80d | 125nm | 80mm dia. | 100nm / 80nm |
| P140L_80d | 140nm | 80mm dia. | 100nm / 80nm |
| P150L_90d | 150nm | 90mm dia. | 100nm / 80nm |
| P200L_90d | 200nm | 90mm dia. | 150nm / 120nm |
| P250L_100d | 250nm | 100mm dia. | 200nm / 100nm |
| P280L_80d | 280nm | 80mm dia. | 200nm / 100nm |
| P300L_100d | 300nm | 100mm dia. | 300nm / 100nm |
| P380L_100d | 380nm | 100mm dia. | 400nm / 300nm |
| P400L_100d | 400nm | 100mm dia. | 300nm / 150nm |
| P450L_100d | 450nm | 100mm dia. | 300nm / 150nm |
| P470L_100d | 470nm | 100mm dia. | 500nm / 400nm |
| P500L_100d | 500nm | 100mm dia. | 400nm / 200nm |
| P560L_80d | 560nm | 80mm dia. | 400nm / 200nm |
| P600L_100d | 600nm | 100mm dia. | 500nm / 250nm |
| P760L_100d | 760nm | 100mm dia. | 700nm / 600nm |
| P800L_100d | 800nm | 100mm dia. | 600nm / 300nm |
| P1000L_100d | 1000nm | 100mm dia. | 800nm / 400nm |
| P1300L_75w55 | 1300nm | 75x55mm² | 1000nm / 500nm |
Holes on Hexagonal Lattice
| Product | Period | Area | Max. Etch depth (Si/quartz) |
|---|---|---|---|
| P200h_h_100d | 200nm | 100mm dia. | 120nm / 100nm |
| P350h_h_100d | 350nm | 100mm dia. | 200nm / 100nm |
| P450h_h_50d | 450nm | 50mm dia. | 350nm / 150nm |
| P500h_h_100d | 500nm | 100mm dia. | 500nm / 300nm |
| P600h_h_100d | 600nm | 100mm dia. | 450nm / 200nm |
| P750h_h_51w51 | 750nm | 51×51mm² | 450nm / 200nm |
| P780h_h_50d | 780nm | 50mm dia. | 450nm / 200nm |
| P870h_h_100d | 870nm | 100mm dia. | 550nm / 250nm |
| P1000h_h_100d | 1000nm | 100mm dia. | 600nm / 300nm |
| P1500h_h_51w51 | 1500nm | 51×51mm² | 600nm / 300nm |
| P1700h_h_100d | 1700nm | 100mm dia. | 800nm / 400nm |
| P2000h_h_100d | 2000nm | 100mm dia. | 1000nm / 400nm |
| P3000h_h_100d | 3000nm | 100mm dia. | 1000nm / 400nm |
| P3450h_h_100d | 3450nm | 100mm dia. | 1200nm / 500nm |
| P5200h_h_100d | 5200nm | 100mm dia. | 1200nm / 500nm |
Pillars on Hexagonal Lattice
| Product | Period | Area | Max. Etch depth (Si/quartz) |
|---|---|---|---|
| P200h_p_100d | 200nm | 100mm dia. | 90nm / 80nm |
| P450h_p_50d | 450nm | 50mm dia. | 350nm / 150nm |
| P500h_p_100d | 500nm | 100mm dia. | 400nm / 200nm |
| P600h_p_100d | 600nm | 100mm dia. | 450nm / 200nm |
| P750h_p_51w51 | 750nm | 51×51mm² | 450nm / 200nm |
| P780h_p_50d | 780nm | 50mm dia. | 450nm / 200nm |
| P870h_p_100d | 870nm | 100mm dia. | 550nm / 250nm |
| P1000h_p_100d | 1000nm | 100mm dia. | 600nm / 300nm |
| P1500h_p_51w51 | 1500nm | 51×51mm² | 600nm / 300nm |
| P1700h_p_100d | 1700nm | 100mm dia. | 800nm / 400nm |
| P2000h_p_100d | 2000nm | 100mm dia. | 800nm / 400nm |
| P3000h_p_100d | 3000nm | 100mm dia. | 1000nm / 400nm |
| P3450h_p_100d | 3450nm | 100mm dia. | 1200nm / 500nm |
| P5200h_p_100d | 5200nm | 100mm dia. | 1200nm / 500nm |
Pillars on Square Lattice
| Product | Period | Area | Max. Etch depth (Si/quartz) |
|---|---|---|---|
| P125s_p_90d | 125nm | 90mm dia. | 90nm / 60nm |
| P140s_p_80d | 140nm | 80mm dia. | 75nm / 80nm |
| P150s_p_90d | 150nm | 90mm dia. | 75nm / 80nm |
| P190s_p_100d | 190nm | 100mm dia. | 200nm / 90nm |
| P200s_p_90d | 200nm | 90mm dia. | 200nm / 90nm |
| P250s_p_90d | 250nm | 100mm dia. | 200nm / 100nm |
| P280s_p_80d | 280nm | 80mm dia. | 200nm / 100nm |
| P300s_p_100d | 300nm | 100mm dia. | 200nm / 100nm |
| P380s_p_100d | 380nm | 100mm dia. | 400nm / 300nm |
| P400s_p_100d | 400nm | 100mm dia. | 300nm / 100nm |
| P470s_p_100d | 470nm | 100mm dia. | 500nm / 400nm |
| P500s_p_100d | 500nm | 100mm dia. | 400nm / 150nm |
| P560s_p_80d | 560nm | 80mm dia. | 400nm / 150nm |
| P600s_p_100d | 600nm | 100mm dia. | 500nm / 250nm |
| P760s_p_100d | 760nm | 100mm dia. | 700nm / 600nm |
| P800s_p_100d | 800nm | 100mm dia. | 500nm / 300nm |
