Equipment

ABOUT

PhableX

The PhableX tool is a semi-automated lithography solution for photonics customers. The two port cassette design with transfer robot increases consistency and throughput. Automated wafer alignment and handling make the PhableX an operator-friendly platform. The PhableX is customizable with UV and DUV sources, 150mm and 200mm beam size, and various mask sizes.

ABOUT

Applications

The applications are almost unlimited including:

OPTOELECTRONICS

DFB/DBR Lasers
VCSEL Polarizer Gratings
PCSEL Photonic Crystals
Nanowire Devices
PSS

OPTICAL COMPONENTS

Telecom Gratings
Anti-Reflective Surfaces
DOE
Laser Diffraction Gratings
Spectrometer Gratings
Wire Grid (Polarizer)
WSS
Sports optics – Reticles

XR (AR/VR/MR)

Near-Eye Waveguides
Head-Up Displays (HUD)

BIO/MEDICAL

Bio Molecular Sensors
X-Ray Imaging

COLOR/VISUAL EFFECT

Structural Colors
Security Applications

DETAILS

More on PhableX.

To learn more about the product, download the flyer below

PhableX FLYER
(Industrial Manufacturing of Photonics Patterns)

PhableX FLYER
(Photoresist Development & Qualification)

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