EULITHA

Equipment

ABOUT

PhableX

The PhableX tool is a semi-automated lithography solution for photonics customers. The two port cassette design  with transfer robot increases consistency and throughput. Automated wafer alignment and handling make the PhableX an operator-friendly platform. The PhableX is customizable with UV and DUV sources, 150mm and 200mm beam size, and various mask sizes. 

ABOUT

Applications
The applications are almost unlimited including:

OPTOELECTRONICS

  • DFB/DBR Lasers
  • VCSEL Polarizer Gratings
  • PCSEL Photonic Crystals
  • Nanowire Devices
  • PSS

OPTICAL COMPONENTS

  • Telecom Gratings
  • Anti-Reflective Surfaces
  • DOE
  • Laser Diffraction Gratings
  • Spectrometer Gratings
  • Wire Grid (Polarizer)
  • WSS
  • Sports optics – Reticles

XR (AR/VR/MR)

  • Near-Eye Waveguides
  • Head-Up Displays (HUD)

BIO/MEDICAL

  • Bio Molecular Sensors
  • X-Ray Imaging

COLOR/VISUAL EFFECT

  • Structural Colors
  • Security Applications

DETAILS

More on PhableX.
To learn more about the product, download the flyer below
PhableX FLYER
PhableX (Waveguide) FLYER

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