The PhableX tool is a semi-automated lithography solution for photonics customers. The two port cassette design with transfer robot increases consistency and throughput. Automated wafer alignment and handling make the PhableX an operator-friendly platform. The PhableX is customizable with UV and DUV sources, 150mm and 200mm beam size, and various mask sizes.
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Applications
The applications are almost unlimited including:
OPTOELECTRONICS
DFB/DBR Lasers
VCSEL Polarizer Gratings
PCSEL Photonic Crystals
Nanowire Devices
PSS
OPTICAL COMPONENTS
Telecom Gratings
Anti-Reflective Surfaces
DOE
Laser Diffraction Gratings
Spectrometer Gratings
Wire Grid (Polarizer)
WSS
Sports optics – Reticles
XR (AR/VR/MR)
Near-Eye Waveguides
Head-Up Displays (HUD)
BIO/MEDICAL
Bio Molecular Sensors
X-Ray Imaging
COLOR/VISUAL EFFECT
Structural Colors
Security Applications
DETAILS
More on PhableX.
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PhableX FLYER
PhableX (Waveguide) FLYER
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