Equipment
ABOUT
PhableX
The PhableX tool is a semi-automated lithography solution for photonics customers. The two port cassette design with transfer robot increases consistency and throughput. Automated wafer alignment and handling make the PhableX an operator-friendly platform. The PhableX is customizable with UV and DUV sources, 150mm and 200mm beam size, and various mask sizes.
ABOUT
Applications
The applications are almost unlimited including:
OPTOELECTRONICS
- DFB/DBR Lasers
- VCSEL Polarizer Gratings
- PCSEL Photonic Crystals
- Nanowire Devices
- PSS
OPTICAL COMPONENTS
- Telecom Gratings
- Anti-Reflective Surfaces
- DOE
- Laser Diffraction Gratings
- Spectrometer Gratings
- Wire Grid (Polarizer)
- WSS
- Sports optics – Reticles
XR (AR/VR/MR)
- Near-Eye Waveguides
- Head-Up Displays (HUD)
BIO/MEDICAL
- Bio Molecular Sensors
- X-Ray Imaging
COLOR/VISUAL EFFECT
- Structural Colors
- Security Applications
DETAILS
More on PhableX.
To learn more about the product, download the flyer below
PhableX FLYER
(Industrial Manufacturing of Photonics Patterns)
PhableX FLYER
(Photoresist Development & Qualification)
