EULITHA

Equipment

ABOUT

PhableS

The PhableS is a step-and-repeat lithography tool designed for larger wafer sizes, such as 200mm, 300mm, and beyond. Using the large exposure fields of displacement Talbot lithography (DTL), the PhableS tool can fill larger substrates with multiple exposures. This tool is equipped with automated wafer and mask handling within a particle-controlled environment, ideal for high-volume industrial production. It features a variable exposure field size, allowing selective printing across multiple device masks.

ABOUT

Applications

Our applications span a diverse range of fields, including

OPTOELECTRONICS

  • DFB/DBR Lasers
  • VCSEL Polarizer Gratings
  • PCSEL Photonic Crystals
  • Nanowire Devices
  • PSS

OPTICAL COMPONENTS

  • Telecom Gratings
  • Anti-Reflective Surfaces
  • Wire Grid (Polarizer)
  • Laser Diffraction Gratings
  • Spectrometer Gratings
  • Sports optics – Reticles

XR (AR/VR/MR)

  • Near-Eye Waveguides
  • Head-Up Displays (HUD)

BIO/MEDICAL

  • Bio Molecular Sensors
  • X-Ray Imaging

COLOR/VISUAL EFFECTS

  • Structural Colors
  • Security Applications

DETAILS

More on PhableS

To learn more about the product, download the flyer below
PhableS FLYER

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