Eulitha builds lithography equipment for high-resolution patterning, from table-top tools for R&D and low-volume work to step-and-repeat platforms for high-volume production on large substrates. Every system runs DTL, our patented Displacement Talbot Lithography process. PhableX and PhableS are also available in Ultra versions, with a minimum pattern pitch of 100 nm.
Table-top, manual lithography tool for R&D and low volume manufacturing of photonics patterns on small substrates
Semi-automated lithography system for pilot to production on mid-sized substrates
Step-and-repeat lithography system for high volume manufacturing of large-sized substrates
